SÜSS Microtec Delta 80 RC Spin Coater Rotationsbeschichter

SÜSS Microtec

Hier bieten wir ein Spin Coater System an.

The Delta 80RC manual Spin Coater from SUSS
MicroTec is based on the well known SUSS patent-
ed GYRSET® closed cover coating technology. It
combines state of the art technology with innovative
excellence.
The Delta 80RC can process delicate wafer fragments,
wafers up to 8" (200 mm) or substrates up to
6"x6" (150x150 mm).
The unique design of the Delta 80RC process chamber
provides a better uniformity than conventional open
bowl spin coaters. At the same time it can significantly
reduce resist consumption up to 60% for resists like
BCB compared to conventional spin coating systems.
The Delta 80RC with GYRSET® technology is also the
ideal tool for coatings over topographies in the range
of up to 20 μm. Better uniformity and less resist con-
sumption make the SUSS Delta 80RC Spin Coater the
ideal tool regarding cost of ownership.
The SUSS Delta 80RC Spin Coater is simple to
operate with fully programmable process parame-
ters. The system is available as a bench mounted
module or for stand alone operation integrated into
an attractive stainless steel cabinet. A variety of
options are available.

Zustand: gebraucht / used

Typ: Delta 80 RC

Lieferumfang: (Siehe Bild)
 
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